RC delay
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Resistive Capacitive delay, or RC delay, hinders the further increasing of speed in microelectronic integrated circuits. When the feature size becomes smaller and smaller to increase the clock speed, the RC delay plays a more and more important role. This delay can be reduced by replacing the Al conducting wire by Cu, thus reducing the resistance; Also can be reduced by changing the interlayer SiO2 to low dielectric materials, thus reduces the capacity.
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